UV lens

Ultraviolet Lens

Ultraopto UV lens series covers the full UV core bands 193nm, 214nm, 248nm, 266nm, 355nm, using high-purity substrate materials such as calcium fluoride and fused quartz, crafted through precision optical processing and advanced coating technology, with ultra-high transmittance, excellent surface shape accuracy and strong laser resistance, Effectively suppressing intrinsic absorption and coating defects in the ultraviolet band, it is a core optical component of excimer laser systems, lithography optical systems, and various ultraviolet laser optical systems, providing a highly reliable solution for ultraviolet laser transmission, focusing, and collimation.


Ultraopto can precisely customize the lens parameters and process according to the customer's application scenarios, and provide one-to-one technical connection throughout the entire process to match personalized requirements.


Core product advantages

1.High transmittance and low absorption, excellent optical performance

In response to the high photon energy and material absorption characteristics of the ultraviolet band, a customized anti-reflection coating scheme is designed using advanced coating technologies such as electron beam evaporation, double ion beam sputtering, magnetron sputtering, combined with laser pretreatment, ion beam post-treatment and other processes to achieve ** ultra-high transmittance ** in all bands, effectively reducing the light absorption between the coating layer and the substrate and reducing laser energy loss Avoid optical performance degradation due to thermal effects.

 

2.High damage threshold, suitable for strong laser conditions

The system is designed and managed from five dimensions: substrate quality, processing quality, coating quality, post-treatment process, and surface cleanliness control. High-purity substrates of calcium fluoride and fused quartz with low impurity and low bubble rate are selected. Subsurface damage and coating defects are precisely controlled. The product has industry-leading laser damage threshold, can withstand strong ultraviolet laser irradiation for a long time, and significantly extends service life. Reduce system maintenance costs.

 

3.Precision machining, with both surface shape and accuracy

Through precision milling and grinding, multi-pass polishing, full-band detection (Zygo MST 12 interferometer, white light roughness interferometer, etc.), the lens' surface shape accuracy, transmitted wavefront and surface finish are strictly controlled to effectively reduce wavefront distortion during laser transmission and ensure the transmission, focusing and collimation accuracy of ultraviolet laser, Adapted to the requirements of high-precision ultraviolet optical systems.

 

4.Strict quality control, consistent performance

Equipped with a full set of ultraviolet optical testing equipment to achieve full-dimensional performance verification such as weak absorption/temperature rise, high-precision surface shape/profile, high scattering, surface cleanliness, transmittance, etc. From raw material entry to finished product exit, every process undergoes non-destructive testing to ensure high consistency of product parameters, suitable for the long-term stable operation of industrial-grade and research-grade ultraviolet laser systems.

 

5.Outstanding customization capabilities, all-scenario adaptation

Based on the customer's ultraviolet laser system parameters and application scenarios, we can customize core parameters such as the base material, band fit, focal length, size specification, and surface shape accuracy of the lens. At the same time, we can provide additional processes such as chamfering, anti-reflection edge, and special clean packaging to create an exclusive ultraviolet lens solution to meet the personalized application requirements under special working conditions.

 

Core Product parameters table of UV lenses

Product    Model

(Adapted    band

193nm    ultraviolet lens

214nm    UV lens

248nm    UV lens

266nm    UV lens

355nm    UV lens

Substrate   material

Calcium   fluoride (CaF)

Fused   quartz

Fused   quartz

Fused   quartz

Fused   quartz

Central   wavelength transmittance

T   99.03% or greater @ 193 nm

T   99.5% or greater @ 214 nm

T   > 99.7% @ 248 nm

T   > 99.5% @ 266 nm

T   99.8% or greater @ 355 nm

Surface   finish

20-10   scratch-dig

20-10   scratch-dig

20-10   scratch-dig

20-10   scratch-dig

20-10   scratch-dig

Aperture   for light passage

95%

97%

95%

95%

95%

Transmitted   wavefront (@633nm)

PV   1/10λ

PV   1/10λ

PV   1/10λ

PV   1/10λ

PV   1/10λ

Laser   damage threshold

2J/cm²@193nm (1-on-1)

2.5J/cm²@214nm (1-on-1)

3J/cm²@248nm (1-on-1)

3.5J/cm²@266nm (1-on-1)

300MW/cm²@355nm (S-on-1)

Coating   process

High   damage threshold anti-reflection coating

High   damage threshold antireflection coating

Magnetron   sputtering hard film reflection enhancement

Magnetron   sputtering hard film reflection enhancement

High   damage threshold antireflection film

Core   control indicators

Low   birefringence, low impurity defect

Low   weak absorption, high film layer adhesion

Hard   film wear resistance, high density

Low   scattering, high laser resistance

Low   temperature rise and high energy tolerance

Typical   application areas

Excimer   laser systems, lithography optical systems

Excimer   laser systems, lithography optical systems

Excimer   laser systems, lithography optical systems

Excimer   laser systems, lithography optical systems

All   kinds of ultraviolet laser optical systems

Range of customized services

Based on our professional optical design and R&D team, we can provide full-dimensional customization services tailored to the actual application requirements of our customers. The customization scope covers:


1.Optical parameter customization: 

Focal length, radius of curvature, numerical aperture (NA), transmission wavefront accuracy (PV/RMS), etc.


2.Size specification customization: 

Outer diameter/side length, thickness of circular/square lenses, custom processing of irregular lenses;


3.Process customization: 

Special coating schemes (narrow band/wide band anti-reflection), chamfering (C0.2 - C1.0mm), anti-reflection edges, surface hydrophobic/hydrophilic modification;


4.Customized packaging: 

Vacuum clean packaging, anti-static packaging, customized protective packaging to meet the storage and transportation requirements of high-precision optical components;


5.System adaptation customization: 

Based on the overall design of the customer's ultraviolet laser system, conduct optical simulation and optimization design of the lens to achieve system-level performance matching.

 

Quality assurance and full-dimensional inspection capabilities

The company has established a full-process quality control system covering ** raw materials - processing - coating - finished products, equipped with a full set of high-end optical testing equipment to precisely test and verify the core performance of ultraviolet lenses to ensure that the products meet industry standards and customer requirements:

1.Optical Performance testing: 

High-precision transmittance/reflectance testing, thin film weak absorption testing (PCI-TR), temperature rise testing, high scattering testing (BRDF/BTDF/TIS);


2.Surface shape and precision testing: 

Zygo MST 12 interferometer (surface shape, transmission wavefront), non-contact profilometer, atomic force microscope (surface roughness);


3.Surface quality inspection: 

VHX-7000 Digital Optical microscope (surface defects, impurity points), Dark field scattering defect instrument (subsurface damage);


4. Material property testing: 

Fluorescence spectrometer (substrate defects), secondary ion mass spectrometer (impurity elements), water droplet Angle measuring instrument (surface wettability);


5.Laser resistance testing:  

Laser target testing (damage threshold), long-term laser irradiation aging testing (service life).


Ultraopto’s UV Lens (Ultraviolet Lens) is a high-performance optical component specifically engineered for precise light focusing and imaging in the ultraviolet spectral range, serving as a core part in semiconductor manufacturing, industrial quality inspection, scientific research and high-precision optical systems. With advanced optical design and premium material selection, this lens delivers exceptional transmittance, resolution and stability, meeting the stringent requirements of diverse UV-based applications.


Core Materials and Optical Design: Laying the Foundation for High Performance

Crafted from high-purity UV-transparent materials including UV fused silica, calcium fluoride (CaF₂) and magnesium fluoride (MgF₂), our UV Lens ensures broad spectral coverage from 200nm to 400nm, with transmittance exceeding 90% in the target UV band to minimize light absorption and energy loss. The fused silica variant offers excellent thermal stability and resistance to radiation-induced fluorescence, making it ideal for high-power UV laser applications, while CaF₂ lenses excel in deep UV scenarios with extended transmission and reduced diffraction artifacts. We adopt advanced low-dispersion optical design and broadband anti-reflection (BBAR) coating technology, effectively suppressing chromatic aberration and surface reflection loss (reduced to below 0.1% per surface), ensuring clear and sharp imaging across the entire UV spectrum.


Key Performance Advantages: Precisely Adapting to Stringent Requirements

Our UV Lens boasts ultra-high resolution supporting 20MP+ high-pixel sensors, enabling the capture of micro-scale details as small as 0.1mm, which is crucial for semiconductor wafer inspection and micro-defect detection. With ultra-low optical distortion (controlled within ±0.1%), the lens ensures accurate geometric imaging for precision measurement applications, reducing the need for post-processing corrections. It features a high laser-induced damage threshold (LIDT >7.5 J/cm² @1064nm, 10ns pulses), withstanding high-energy UV laser irradiation without coating degradation or structural damage. The industrial-grade metal housing and thermal expansion compensation design ensure stable optical performance under temperature fluctuations (-20°C to 80°C) and harsh industrial environments, while strict dimensional tolerance control (+0/-0.1mm for key dimensions) guarantees seamless integration with standard optical interfaces such as C-Mount and F-Mount.


Multi-Scenario Applications: Covering Core Needs of All Industries

Ultraopto’s UV Lens is widely applied in cutting-edge industrial and scientific fields. In semiconductor manufacturing, it plays a vital role in photolithography systems (supporting 193nm ArF and 248nm KrF excimer lasers), focusing UV light to etch nanometer-scale patterns onto silicon wafers with high precision. In industrial inspection, it excels at surface defect detection of electronic components, automotive parts and transparent materials, leveraging UV light’s high contrast to reveal tiny scratches, cracks and welding defects that are invisible to visible light. For scientific research, the lens is essential in biomedical imaging (cell fluorescence labeling observation, tissue sample analysis) and material science (new material spectral characteristic testing, nanomaterial structure research), providing reliable optical support for innovative studies. It also finds applications in security verification (UV anti-counterfeiting detection of documents and tickets) and cultural relic protection (micro-damage inspection of ancient artifacts), unlocking new possibilities in special scenario imaging.


Customization Services: Meeting Personalized Needs

As a leading manufacturer of precision optical components, Ultraopto offers fully customized UV Lens solutions to meet your unique application requirements. Our professional R&D and engineering team can tailor key parameters including lens material (fused silica, CaF₂, MgF₂), spectral range (deep UV, near UV), focal length, aperture size and coating design, optimizing performance for specific wavelengths and application scenarios. We support custom interface designs (C-Mount, F-Mount, M42, etc.) and size customization from small-diameter (5mm) to large-aperture (100mm+) lenses, adapting to both compact device integration and large-scale optical systems. All custom UV Lens orders undergo multi-stage strict quality inspection, including UV transmittance measurement, resolution testing, distortion verification and laser damage threshold assessment, with a detailed quality report provided to ensure compliance with your design specifications.


Quality Assurance and Technical Support: A Trustworthy Choice

Backed by advanced optical manufacturing technology, a complete quality control system and rich experience in UV optical design, Ultraopto ensures stable batch supply and consistent product quality. Our UV Lenses comply with international optical component standards, with surface quality reaching 20-10 scratch-dig and flatness controlled within λ/4 @632.8nm to minimize light scattering. We provide professional technical consultation on lens selection, system integration and performance optimization, as well as long-term after-sales support to address your application challenges. Whether you need standard products for mass production or custom solutions for cutting-edge research, Ultraopto’s UV Lens delivers reliable performance and exceptional value to support the success of your projects.


For more detailed technical parameters, product quotation information or custom design solutions for our Ultraopto UV Lens, please contact our professional sales and technical team through the official website, and we will provide you with efficient, personalized and professional optical solutions.


Quick Inquiry