Ultraviolet laser window sheet
High damage threshold, low absorption high transmittance, long life UV laser window, covering the full UV core band 193nm-355nm, made from selected high-purity substrates of calcium fluoride and fused quartz through precision processing and exclusive coating process, effectively suppressing intrinsic absorption and coating defects in the UV band, resistant to strong laser irradiation, It is widely used in excimer laser systems, photolithography optical systems, and all kinds of ultraviolet laser optical equipment, providing high reliability protection and transparency guarantee for ultraviolet laser transmission, and supporting customized parameter matching.
Ultraopto can precisely customize the lens parameters and process according to the customer's application scenarios, and provide one-to-one technical connection throughout the entire process to match personalized demands.
Core Advantage
1. Low absorption and high transmittance, industry-leading transmittance across all bands, reducing laser energy loss
2. High damage threshold, resistant to long-term exposure to strong ultraviolet lasers, the film layer is firmly bonded to the substrate
3. Precision machining, high surface finish, stable surface shape, no obvious wavefront distortion
4. Strict quality control, full-process inspection, high performance consistency, suitable for industrial/scientific precision working conditions
UV Laser Window Sheet Core Parameters Table
Adapted bands | Base material | Central wavelength transmittance | Surface finish | Aperture of light passage | Laser damage threshold | Coating process | Typical applications |
193nm | Calcium fluoride (CaF₂) | 99.03% or greater @ 193 nm | 20-10 scratch-dig | ≥95% | ≥2J/cm²@193nm (1-on-1) | High damage threshold antireflection coating | Excimer lasers, lithography systems |
214nm | Fused quartz | 99.5% or greater @ 214 nm | 20-10 scratch-dig | ≥97% | ≥2.5J/cm²@214nm (1-on-1) | High damage threshold antireflection coating | Excimer lasers, lithography systems |
248nm | Fused quartz | > 99.7% @ 248 nm | 20-10 scratch-dig | ≥95% | ≥3J/cm²@248nm (1-on-1) | Magnetron sputtering hard film reflection enhancement | Excimer lasers, lithography systems |
266nm | Fused quartz | > 99.5% @ 266 nm | 20-10 scratch-dig | ≥95% | ≥3.5J/cm²@266nm (1-on-1) | Magnetron sputtering hard film reflection enhancement | Excimer laser systems |
355nm | Fused quartz | 99.8% or greater @ 355 nm | 20-10 scratch-dig | ≥95% | ≥300MW/cm²@355nm (S-on-1) | High damage threshold antireflection membrane | All kinds of ultraviolet laser optical systems |
Custom range
Size specifications:
Round φ5 to φ200mm/ square 5×5 to 150×150mm, thickness 1 to 20mm
Process customization:
Chamfering, surface clean treatment, vacuum-sealed packaging, special anti-reflection coating
Precision customization:
Higher surface shape precision, customized aperture ratio
Ultraopto’s Ultraviolet (UV) Laser Window Sheet is a high-performance optical component designed to protect internal optical systems while enabling efficient UV light transmission, serving as a core part in UV laser processing equipment, semiconductor lithography tools, optical sensors and precision laboratory instruments. Crafted from premium UV-transparent materials including fused silica, calcium fluoride (CaF₂) and magnesium fluoride (MgF₂), our UV Laser Window Sheet delivers a transmittance exceeding 90% across the UV spectral range (193nm-355nm), with minimal absorption and reflection loss for maximum light energy utilization. The material selection is optimized for specific UV wavelengths, with fused silica ideal for 193nm ArF excimer laser applications and CaF₂ offering extended transmission into the deep UV range.
Manufactured with advanced precision polishing and cleaning processes tailored for UV applications, our UV Laser Window Sheet achieves a superior surface quality with a 20/10 scratch-dig rating and ultra-strict flatness control (λ/4 @632.8nm), minimizing light scattering and wavefront distortion in high-precision optical systems. We implement tight dimensional tolerance control (±0.05mm for thickness, ±0.1mm for length/width) and excellent parallelism (<1 arc minute), ensuring seamless integration into complex UV laser systems and compatibility with standard mounting configurations. The window sheet exhibits a high laser-induced damage threshold (LIDT >5 MW/cm² for 193nm pulses), withstanding high-energy UV laser irradiation without structural damage or performance degradation.
The UV Laser Window Sheet features optional anti-reflection (AR) coatings optimized for specific UV wavelengths, reducing surface reflection loss to below 0.1% per surface and further enhancing transmittance efficiency. The durable material exhibits excellent environmental stability, including corrosion resistance, temperature change resistance and humidity resistance, protecting internal optical components from dust, moisture and mechanical damage while maintaining optical performance. We offer standard sizes ranging from 5mm to 100mm in diameter/length, with fully custom dimensions, shapes (circular, rectangular, special-shaped) and protective chamfers (<0.2mm×45°) available to meet diverse application requirements. The window sheet’s low thermal expansion coefficient ensures stable performance under temperature fluctuations, making it suitable for high-temperature industrial environments and precision laboratory setups.
Ultraopto’s UV Laser Window Sheet is widely applied in professional UV optical fields, including UV laser processing for protecting laser cavities and beam delivery systems during micro-machining, drilling and cutting operations. In semiconductor lithography, it serves as a protective window for 193nm lithography tools, ensuring precise light transmission while shielding sensitive optical components. The window sheet is also essential in optical sensors and detectors for UV-based measurement and analysis, providing environmental protection without compromising signal integrity. In scientific research, it is used in UV spectroscopy, fluorescence microscopy and laser-based experiments requiring reliable UV light transmission, as well as in aerospace and defense optical systems for UV detection and surveillance. Its combination of high UV transmittance, laser resistance and environmental protection makes it an indispensable component in modern UV optical systems.
As a leading manufacturer of UV optical components, Ultraopto offers fully customized UV Laser Window Sheet solutions to meet your unique application requirements. Our professional R&D and engineering team can tailor substrate materials, dimensions, surface quality, flatness and optional coatings to optimize performance for specific UV wavelengths and operating conditions. We provide ultra-strict tolerance control for critical parameters such as transmittance, thickness and parallelism, ensuring compliance with the stringent requirements of semiconductor and high-power laser systems. All custom window sheet orders undergo multi-stage strict quality inspection, including UV transmittance measurement, surface quality analysis, LIDT testing and environmental stability verification, with a detailed quality report provided to ensure compliance with your design specifications. Backed by advanced UV optical processing technology, a complete quality control system and expertise in laser optical components, Ultraopto is committed to providing global customers with high-quality UV Laser Window Sheet products and comprehensive optical solutions. For more detailed technical parameters, product quotation information or custom design solutions, please contact our professional sales and technical team through the official website.
