Ultraviolet laser reflector
A range of UV laser reflectors with high damage threshold and long lifespan. The product covers the full ultraviolet band 193nm, 214nm, 248nm, 266nm, 355nm, and is compatible with common incident angles such as 0°, 45°, etc. With ultra-high reflectivity, excellent surface accuracy and stable laser resistance, it becomes a core accessory for excimer laser systems, photolithography optical systems, and various ultraviolet laser optical systems.
Core Product advantages
1.High damage threshold, extra-long service life:
From high-purity substrate selection, precision optical processing to advanced coating process, full-process multi-dimensional control (substrate quality, processing quality, coating quality, post-treatment process, surface cleanliness control) effectively supines subsurface damage and coating defects. Each band of products has industry-leading laser damage thresholds, can withstand strong laser irradiation for a long time, significantly reduces system maintenance costs.
2.Ultra-high reflectance, excellent optical performance:
Customized coating solutions for different ultraviolet bands, advanced coating technologies such as electron beam evaporation, double ion beam sputtering, magnetron sputtering, combined with laser pretreatment, film annealing, ion beam post-treatment and other processes, achieve ultra-high reflectance in all bands with stable spectral response and no obvious stray reflection.
3.Precise surface shape control, superior imaging quality:
By precision milling, multi-pass polishing, full-band detection (Zygo MST 12 interferometer, etc.), the accuracy of the reflective surface shape is strictly controlled, with a surface shape PV value of 1/8@633nm (1/10@633nm for some specifications), a light aperture of ≥95%, and a finish of 20-10 scratch-dig. Effectively ensure the accuracy of laser transmission and imaging.
4.Strict quality control system, consistent performance:
Multi-dimensional inspection (surface defects, scattering characteristics, weak absorption, temperature rise, etc.) is implemented throughout the entire process from raw material entry to finished product exit to ensure high consistency of product parameters, meeting the long-term stable operation requirements of industrial-grade laser systems.
Full range of product specifications
193nm UV laser reflector (calcium fluoride substrate)
Fit angles: 0°, 45°
Reflectance: 0°≥96.3%@193nm; 45°Ra≥96.33%@193nm (RP 94.96%, RS 97.69%)
Surface shape accuracy: PV 1/8@633nm
Finish: 20-10 scratch-dig
Aperture of light: ≥95%
Damage threshold: ≥2J/cm²@193nm; 1-on-1
Application areas: excimer laser systems, lithography optical systems
214nm ultraviolet laser reflector (fused quartz substrate)
Compatible angles: 0°, 45°
Reflectance: 0°>99.5%@214nm; 45°Ra≥97.35%@214nm (Rp96.01%, Rs98.69%)
Surface shape accuracy: PV 1/8@633nm
Finish: 20-10 scratch-dig
Aperture of light: ≥95%
Damage threshold: ≥2.5J/cm²@214nm; 1-on-1
Application areas: excimer laser systems, lithography optical systems
248nm ultraviolet laser reflector (fused silica substrate, magnetron sputtering hard film)
Fit Angle: 0°
Reflectance: >99.8%@248nm
Surface shape accuracy: PV 1/8@633nm
Finish: 20-10 scratch-dig
Aperture of light: ≥95%
Damage threshold: ≥3J/cm²@248nm; 1-on-1
Application areas: excimer laser systems, lithography optical systems
266nm ultraviolet laser reflector (fused quartz substrate, magnetron sputtering hard film)
Fit Angle: 0°
Reflectance: >99.3%@266nm
Surface shape accuracy: PV 1/8@633nm
Finish: 20-10 scratch-dig
Aperture of light: ≥95%
Damage threshold: ≥3.5J/cm²@266nm; 1-on-1
Application areas: excimer laser systems, lithography optical systems
355nm ultraviolet laser reflector (fused silica substrate)
Compatible angles: 0°, 45°
Reflectance: ≥99.8%@355nm
Surface shape accuracy: PV 1/8@633nm
Finish: 20-10 scratch-dig
Aperture of light: ≥95%
Damage threshold: ≥300MW/cm²@355nm; S-on-1
Application area: All kinds of ultraviolet laser optical systems
Customized services
Based on a research and development team of more than 20 optical PHDS and senior engineers, we can provide customized development services for ultraviolet laser mirrors according to the actual application scenarios of customers (such as special incident angles, customized bands, ultra-high precision surface shape requirements, laser resistance under extreme conditions, etc.), from optical design, material selection to processing and coating, testing and verification, One-to-one technical connection throughout the entire process to create exclusive optical component solutions tailored to customer needs.
Quality Assurance
The company has a full set of R&D and testing equipment for ultraviolet optical components, which can achieve full-dimensional performance verification such as thin film weak absorption/temperature rise detection, high-precision surface shape/profile measurement, high scattering test, surface wettability measurement, high reflectance precision detection, etc. All products undergo strict testing before leaving the factory to ensure that the delivered products meet industry standards and customer requirements.
Manufactured with strict precision processing and coating quality control, our UV Laser Reflector achieves a superior surface quality with a 10/5 scratch-dig rating and ultra-low surface roughness (<0.5nm), minimizing light scattering and ensuring uniform reflection across the entire clear aperture (>90%). The reflector exhibits an enhanced laser-induced damage threshold (LIDT) increased by a factor of ~1.3 compared to traditional mirrors, withstanding high-energy UV laser pulses (7.6ns at 355nm) without coating degradation or structural damage. We implement tight dimensional tolerance control (+0.0/-0.1mm for diameter) and excellent parallelism (<30 arc seconds), ensuring seamless integration into high-precision UV laser systems. The durable coating exhibits excellent environmental stability, resisting humidity, chemical corrosion and UV degradation, ensuring long-term reliable operation in harsh industrial environments and laboratory conditions.
As a professional manufacturer of high-performance UV optical components, Ultraopto offers fully customized UV Laser Reflector solutions to meet your unique application requirements. Our experienced R&D and engineering team can tailor substrate materials (fused silica, sapphire, MgF₂), coating designs and dimensions to optimize performance for specific UV wavelengths and laser power levels. We provide ultra-strict tolerance control for critical parameters such as reflectivity, LIDT and surface quality, ensuring compliance with the stringent requirements of semiconductor and high-power laser systems. All custom UV Laser Reflector orders undergo multi-stage strict quality inspection, including UV reflectivity measurement, LIDT testing, surface roughness analysis and environmental stability verification, with a detailed quality report provided to ensure compliance with your design specifications. Backed by advanced nanolaminate coating technology, a complete quality control system and expertise in UV optical design, Ultraopto is committed to providing global customers with high-quality UV Laser Reflector products and comprehensive optical solutions. For more detailed technical parameters, product quotation information or custom design solutions, please contact our professional sales and technical team through the official website.
