Flat Optics Processing
UltraOpto - Capabilities | Flat Optics ProcessingWe specialize in high-precision Flat Optics Processing for glass, fused silica, sapphire, CaF₂ and other optical materials, providing one-stop manufacturing from raw material cutting to finished substrate delivery for window plates, planar mirror substrates, optical flats and custom flat optical components. Our processing covers UV/VIS/IR wavelength applications, with core advantages of ultra-smooth surface, micron-level dimensional control and laser-grade surface quality, fully meeting the strict requirements of semiconductor, laser, aerospace, medical and scientific research fields.
Core Processing Advantages
End-to-end in-house manufacturing, no outsourcing, strict quality control in every process
Professional processing for brittle/high-purity optical materials (193nm fused silica, CaF₂, sapphire)
Customizable processing for standard/large-aperture/irregular flat optics
Laser-grade sub-surface damage control, ultra-low surface roughness
Compliant with ISO 10110 optical standards, full traceability of test data
Flat Optics Processing Workflow | Equipment | Precision Specifications
(Matching Process Display Pictures: It is recommended to use real factory pictures for each process, with the picture description corresponding to the process name, such as "Multi-wire Saw for Raw Material Cutting", "High-precision Double-sided Lapping Machine")
Processing Step | Core Processing Equipment | Key Precision Indicators | Process Picture Matching Suggestion |
1. Raw Material Cutting | Multi-wire Saw, Inner/Outer Diameter Saw, Laser Cutter (for micro-sheets) | Thickness tolerance: ±0.5 mm Shape dimension tolerance: ±0.3 mm Cutting surface: No obvious chipping, damage layer controllable | Close-up of multi-wire saw cutting fused silica/glass block, with finished semi-finished round/square sheet |
2. Shape Grinding & Chamfering | CNC Optical Shape Grinder, Automatic Chamfering Machine, Peripheral Grinding Machine | Outer diameter/side length tolerance: ±0.05 mm Thickness tolerance: ±0.1 mm Chamfer: 0.1–0.5 mm × 45° (customizable) Parallelism: ＜1 arcmin Surface roughness: Ra ＜ 0.8 μm | CNC grinder processing the outer shape of flat optics, automatic chamfering machine working on the edge of window plate |
3. Double-sided Rough Lapping | High-precision Double-sided Lapping Machine (Planetary Structure) | Thickness tolerance: ±0.02 mm Flatness: ＜5 μm Parallelism: ＜30 arcsec Thickness uniformity: ±0.01 mm Surface roughness: Ra ＜ 0.4 μm | Double-sided lapping machine with planetary jig, lapping of glass/fused silica flat sheet |
4. Double-sided Fine Lapping | Precision Planetary Double-sided Lapping Machine (with fine grinding slurry system) | Thickness tolerance: ±0.01 mm Flatness: 1–3 μm Parallelism: 10–30 arcsec Surface roughness: Ra ＜ 0.1 μm Subsurface damage (SSD): Controllable, to be removed by polishing | Fine lapping process of fused silica substrate, close-up of lapping slurry and workpiece fit |
5. Double-sided Precision Polishing | Ultra-precision Double-sided Polishing Machine, High-speed Ring Polisher, Planetary Polishing Machine (with dedicated polishing pad/ slurry) | Thickness tolerance: ±0.005 mm (±0.001 mm for high-precision custom) Flatness: λ/10~λ/20 @633 nm (up to λ/50 for ultra-high precision) Parallelism: ≤5 arcsec (up to ≤2 arcsec for custom) Surface quality: 10-5/20-10 (ISO 10110), laser-grade 5-2 optional Surface roughness: Ra ＜ 0.5 nm SSD: ＜1 μm (laser-grade), ＜0.5 μm for ultra-high power laser | Core polishing equipment working scene, ultra-smooth finished surface of fused silica window plate (with light reflection effect) |
6. Precision Cleaning | Full-automatic Optical Component Cleaning Machine (ultrasonic + roller brush), Class 100/1000 Cleanroom Drying Table, Pure Water Circulation System | Particle size control: ≤0.2 μm Cleanliness: Meet vacuum coating requirements Surface state: No polishing powder/oil residue, water-free mark Environment: Class 100 cleanroom operation for final cleaning | Automatic cleaning machine internal structure, cleanroom drying table with finished flat optics |
7. Metrology & Final Inspection | Zygo Laser Interferometer, Autocollimator, High-precision Thickness Gauge, Scratch-Dig Tester, Surface Profilometer/AFM, 2D Image Measuring Instrument | Flatness: Calibrated by Zygo interferometer, full surface scanning Parallelism: Autocollimator test, accuracy ≤1 arcsec Thickness: Test repeatability ±0.0001 mm Surface defect: 100% scratch-dig inspection (ISO 10110) Dimension: Full size detection, tolerance traceability | Engineer operating Zygo interferometer to test flatness, scratch-dig tester for surface defect inspection |
Key Process Supporting Capabilities
Material Expertise for Flat Optics Processing
We master the professional processing technology of various optical materials for flat components, and customize processing parameters according to material characteristics to avoid chipping, cracking and thermal deformation:
Optical Glass:
N-BK7, Borofloat, K9, B270
High-purity Quartz/Fused Silica:
193nm/248nm DUV grade fused silica, synthetic fused silica
Crystal Materials:
Sapphire (Al₂O₃), Calcium Fluoride (CaF₂), Magnesium Fluoride (MgF₂), Si, Ge
Low Thermal Expansion Material:
ULE, Zerodur (for ultra-stable flat optics)
Custom Processing Capabilities Size Range:
Standard 5 mm – 300 mm (diameter/side), custom large-aperture up to 500 mm
Special Shapes:
Irregular flat optics, rectangular long strip window plates, custom aperture flat sheets
Precision Custom:
Ultra-high flatness (λ/50), ultra-tight parallelism (≤2 arcsec), laser-grade surface quality (5-2)
Batch Support: Small-batch prototyping (1-100 pcs), mass production (1000+ pcs), fast delivery for urgent orders
Application Scenarios of Processed Flat Optics
The high-precision flat optical components processed by our factory are core parts of high-end optical equipment, widely used in:
Semiconductor & Lithography:
193nm/248nm DUV lithography window plates, wafer inspection flat optics
Laser Systems:
Laser window sheets, planar laser reflectors, high-power laser beam delivery components
Aerospace & Defense:
Satellite optical window plates, airborne imaging flat components, night vision device optics
Medical & Life Sciences:
Medical imaging window plates, diagnostic instrument optical flats, laser medical components
Scientific Research & Metrology:
Spectroscopy window plates, precision metrology optical flats, interferometer components
Industrial Inspection:
Machine vision window plates, non-destructive testing flat optics, laser marking components
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