Double-Sided Ultra-Smooth Spherical Mirror Substrate are high-precision optical components, mainly used in high-power lasers, high-precision optical detection, semiconductor manufacturing and inspection fields. Their technical parameters and substrate material selection are in line with the strict requirements of the high-end optical and semiconductor industries.
The specific information is as follows:
Shape and size parameters
Diameter: φ12.7 - φ200mm, with a tolerance of ±0.1mm for all specifications;
Thickness: 4 - 8mm and must be ≥D/8 (D is the diameter), with a tolerance of ±0.5mm, and the index is adapted to the diameter specification;
Bevel: 0.2 - 0.5×45°.
Surface shape accuracy and surface defects
Surface shape accuracy reaches λ/2 - λ/10 @632.8nm,
parallelism error < 15″,
and the center of curvature accuracy is 30″ - 3′;
Surface roughness (Ra) is as low as 0.12nm, measured by a Zygo profilometer at a full frequency of 173×173um and a 50x objective lens full frequency;
Surface defect grade is 10-5, with excellent surface quality.
Substrate materials
Multiple high-end optical substrate materials are provided, including ULE glass, fused silica glass, sapphire K9, microcrystalline glass, and single-crystal silicon ULE, which can meet the optical, thermal, and mechanical performance requirements of different application scenarios.
Material Selection for High-Quality Substrates:
Laying the Foundation for Ultra-Smooth Performance
Our Double-sided Ultra-smooth Spherical Mirror Substrate is crafted from top-tier optical materials such as synthetic fused silica (JGS1/JGS2) and low-expansion optical glass (Zerodur), ensuring outstanding optical homogeneity and thermal stability. Fused silica variants excel in UV to mid-IR spectral transmission (180nm-3μm) and are highly resistant to high-power laser damage, making them ideal for laser cavity applications. Zerodur substrates feature ultra-low thermal expansion (≤0.03×10⁻⁶/℃), ensuring dimensional stability under extreme temperature fluctuations. The substrate blank undergoes rigorous impurity screening and bubble elimination, with internal transmittance exceeding 92% in the visible range to minimize light absorption and scattering.
Ultra-Precision Polishing Process:
Achieving Nanometer-Scale Smoothness
Our Double-sided Ultra-smooth Spherical Mirror Substrate is manufactured using advanced super-precision polishing technologies, including chemical mechanical polishing (CMP) and ion beam figuring (IBF). The double-sided spherical surfaces achieve an ultra-low surface roughness of <0.1nm RMS. Eliminating micro-defects that could affect reflection quality. The spherical curvature radius is controlled within ±0.005mm, and surface accuracy reaches λ/10 @632.8nm, ensuring consistent optical performance across the entire substrate. Edge chamfering (0.3-0.8mm×45°) is applied to prevent chipping and reduce stress concentration during coating and mounting. The polishing process is carried out in a Class 100 cleanroom to avoid surface contamination.
Core performance advantages:
Suitable for high-end optical applications. Ultraopto’s Double-sided Ultra-smooth Spherical Mirror Substrate boasts exceptional surface quality with a scratch-dig rating of 20/10, ensuring minimal surface defects for high-reflection coating adhesion. The double-sided design provides flexibility for dual-purpose applications or integration into complex optical systems, Reducing the need for multiple single-sided substrates. The substrate exhibits high mechanical rigidity and chemical stability, resisting moisture, dust and common industrial chemicals, ensuring long-term performance in harsh environments. Strict dimensional tolerance control (+0/-0.1mm for diameter, ±0.01mm for thickness) enables seamless integration into standard optical mounts and assemblies.
All-scenario application coverage:
Empowering high-end optical equipment. Our Double-sided Ultra-smooth Spherical Mirror Substrate is widely applied in cutting-edge scientific research and industrial fields. In high-power laser systems, it serves as the base for laser cavity mirrors, enabling efficient beam reflection and energy storage. For astronomical telescopes and space-based optical sensors, it provides ultra-smooth surfaces for capturing weak celestial light signals with high resolution. In precision interferometers and optical metrology instruments, it ensures accurate light reflection for sub-micron level measurement. The substrate also finds use in semiconductor lithography tools, medical laser devices and quantum optics experiments, providing a reliable super-smooth base for high-performance optical components.
Customized services:
Meeting personalized needs As a leading manufacturer of super-smooth optical components, Ultraopto offers fully customized Double-sided Ultra-smooth Spherical Mirror Substrate solutions to meet your unique application requirements. Our professional R&D team can tailor key parameters including substrate material (fused silica, Zerodur, optical glass), diameter (10mm-300mm+), curvature radius, Surface roughness (down to 0.05nm RMS) and surface accuracy (up to λ/20 @632.8nm). We support custom thickness specifications and edge treatment designs for specific mounting needs. All custom substrates undergo multi-stage strict quality inspection, including surface roughness measurement, curvature verification, flatness testing and cleanliness assessment. with a detailed quality report provided to ensure compliance with your design specifications.
Quality Assurance and Technical Support:
Your Trusted Choice Backed by advanced super-precision manufacturing technology and a complete quality control system, Ultraopto ensures stable batch supply and consistent product quality. Our production processes adhere to international high-precision optical standards, with each substrate subjected to rigorous testing using atomic force microscopes (AFM) and laser interferometers. We provide professional technical consultation on substrate selection, coating compatibility and system integration, helping you optimize the performance of your optical components. Whether you need standard substrates for laser systems or custom large-aperture bases for telescopes, Ultraopto’s Double-sided Ultra-smooth Spherical Mirror Substrate delivers unparalleled smoothness and reliability.
For more detailed technical parameters, product quotation information or custom design solutions for our Ultraopto Double-sided Ultra-smooth Spherical Mirror Substrate, please contact our professional sales and technical team through the official website, and we will provide you with efficient, personalized and professional optical solutions.
