The main application fields of Micro Diaphragms

  • August 09, 2016

Micro Diaphragms (Micro Diaphragms) Main Application Areas (Technical Description)

UltraOpto Micro Diaphragms (Micro Diaphragms) are a type of miniature core component with ultra-thin thickness, high flatness, excellent mechanical response, and optical transmissibility. They can be customized in different materials (silicon-based, metal, polymer, optical glass) and specifications (thickness from μm to mm level). With the advantages of precise deformation control, corrosion resistance, and compatibility, they are widely used in high-end fields such as medical biology, industrial sensing, optical communication, and aerospace. The following is a detailed introduction to the application scenarios.


I. Medical Biology Field

1. Minimally Invasive Diagnosis and Treatment Devices

Application Scenarios: Endoscope imaging modules, micro pressure sensors, drug delivery systems

Core Function: Using biocompatible polymers or ultra-thin silicon-based micro diaphragms as pressure-sensitive elements or optical windows, they can precisely sense the pressure changes in the human body cavity while ensuring high transmittance of the imaging light path. In drug delivery devices, the diaphragm can achieve controlled release of trace amounts of drugs through precise deformation.

Product Advantages: Thickness can be as low as 5μm, biocompatibility meets ISO 10993 standards, and resistant to body fluid corrosion.


2. In Vitro Diagnostic (IVD) Instruments

Application Scenarios: Immunoassay analyzers, blood testing chips, microfluidic chips

Core Function: As the core valve plate or reaction chamber membrane of microfluidic chips, the diaphragm can be driven by external force to deform, achieving precise transportation, mixing, and reaction of trace samples. In electrochemical detection, metal micro diaphragms can serve as electrode substrates, enhancing detection sensitivity.

Product Advantages: Dimensional accuracy ±1μm, fast response speed, and can be batch-integrated into microchips.


II. Industrial Sensing Field

1. High-Precision Pressure and Flow Sensing

Application Scenarios: Industrial process control sensors, hydraulic / pneumatic system monitoring, micro-flow measurement

Core Function: Using metal or silicon-based micro diaphragms as sensitive elements, external pressure changes will cause diaphragm deformation. The deformation is converted into electrical or optical signals through strain gauges or optical interference principles, achieving precise measurement of pressure at the Pa level.

Product Advantages: Strong fatigue resistance, capable of withstanding millions of cycles of deformation, and operating temperature range -40°C to 150°C.


2. Gas Detection and Analysis Equipment

Application Scenarios: Gas sensors, flue gas analyzers, environmental monitoring equipment

Core Function: Selecting micro diaphragms with porous materials can selectively filter gas molecules of specific particle sizes, and at the same time serve as the carrier substrate for gas-sensitive membranes, increasing the contact area between gas and sensitive materials and enhancing detection response speed.

Product Advantages: Controllable porosity (10% to 60%), resistant to acid and alkali corrosion, suitable for complex industrial environments.


III. Optical Communication Field

1. Optical Fiber Communication Devices

Application Scenarios: Optical switches, optical attenuators, optical fiber couplers

Core Function: Using high optical transmissibility glass or polymer micro diaphragms, mechanical driving of diaphragm displacement or deformation can change the light path propagation path or optical path difference, achieving rapid switching of the light path or precise adjustment of optical power.

Product Advantages: Transmittance > 95% @ 850-1550nm, response time < 1ms, low insertion loss.


2. Laser Equipment and Optical Modules

Application Scenarios: Micro laser resonators, laser beam shapers

Core Function: Ultra-thin optical glass micro diaphragms can serve as the substrate for resonator mirrors or beam shaping elements. Their high flatness enables stable laser resonance. In beam shaping, the surface microstructure of the diaphragm can be customized to control the shape of the laser spot.

Product Advantages: Surface flatness λ/20 @ 632.8nm, surface roughness Ra ≤ 0.01μm.


IV. Aerospace Field 1. Micro-sensors for spacecraft

Application scenarios: Satellite attitude control sensors, spacecraft environmental monitoring equipment

Core function: Utilizing metal or ceramic micro-diaphragms that are resistant to high and low temperatures and radiation as the core components of micro-gravity sensors and pressure sensors to monitor internal pressure changes and attitude adjustment data of spacecraft.

Product advantages: Vacuum environment resistant, radiation dose resistance > 100kGy, suitable for extreme space conditions.


2. Micro-thruster system

Application scenarios: Microsatellite thrusters, spacecraft attitude control thrusters

Core function: As the sealing diaphragm of the propellant injection valve, it controls the injection volume and frequency of the propellant by electromagnetic driving of the diaphragm deformation, achieving precise attitude adjustment of the spacecraft.

Product advantages: Excellent sealing performance, leakage rate < 10⁻⁷Pa・m³/s, long service life.


V. Customization advantages of UltraOpto products

Multi-material compatibility: Supports various substrates such as silicon, stainless steel, polyimide, and optical glass to meet the needs of different fields;

High-precision processing: Dimensional tolerance ±1μm, thickness tolerance ±0.5μm, customizable microstructure surfaces;

Stable batch supply: Utilizes wafer-level processing technology to achieve million-level batch production, ensuring delivery efficiency.


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