Storage Precautions for 193NM REFLECTOR

99.999% PLANAR REFLECTOR (Ultra-High Reflectivity Planar Mirror)

 UltraOpto 99.999% flat mirrors feature a reflectivity of 99.999% and a surface accuracy of λ/20. They are suitable for high-end applications such as deep ultraviolet lithography, and offer excellent stability in temperature and humidity as well as strong resistance to laser damage. The parameters are precise and the performance is reliable.

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Storage Precautions for UltraOpto 193NM REFLECTOR (193nm Mirror) (Technical Instructions)

UltraOpto 193NM REFLECTOR (193nm Mirror) is made of calcium fluoride as the core material and is suitable for high-end optical scenarios such as deep ultraviolet lithography and excimer laser systems. Its optical performance and precision are highly dependent on the storage environment and operation norms. To prevent improper storage from causing a decline in reflectivity, surface damage, or precision drift, the following standardized storage precautions are specially formulated.

I. Storage Environment Requirements

Temperature and Humidity Control

The temperature should be maintained at a constant 18–25℃, with a daily temperature fluctuation of no more than ±2℃. High temperatures can cause thermal stress deformation of the base material, while low temperatures can lead to surface condensation.

The relative humidity should be controlled at 30%–50%. A humidity above 50% can promote mold growth and cause oxidation of the coating (for coated types); a humidity below 30% can generate static electricity and attract dust, damaging the optical surface.

Cleanliness Requirements

The storage environment should meet a cleanliness standard of 1000 class. It is recommended to store the mirrors in a clean cabinet or clean room equipped with HEPA high-efficiency filters to prevent dust and particles from adhering to the mirror surface.

Do not perform operations such as grinding or spraying that generate dust in the storage area to prevent contaminants from entering the storage space.

Light and Radiation Protection

Avoid direct ultraviolet light exposure. Long-term UV exposure can accelerate the aging of the calcium fluoride base material and reduce the reflectivity at the 193nm wavelength. When storing, use a light-blocking and dust-proof cover.

Keep away from strong electromagnetic radiation sources (such as high-power motors and high-frequency equipment) to prevent electromagnetic interference from causing abnormal performance of the coating (for coated types).

Gas Environment Requirements

Uncoated mirrors can be directly stored in a dry and clean air environment. Coated mirrors are recommended to be stored in vacuum packaging (with a vacuum degree of ≥10⁻²Pa) or sealed in a container filled with dry nitrogen (with a purity of ≥99.99%) to isolate oxygen and water vapor and extend the life of the coating.

II. Packaging and Placement Standards

Packaging Requirements

Each mirror should be independently packaged: first wrap the mirror surface with anti-static optical-grade wiping paper, then place it in a custom hard foam or EVA shock-absorbing inner liner to ensure there are no direct force points on the mirror surface.

The outer packaging should use a well-sealed anti-static aluminum foil bag or PP sealed box. Place a desiccant (silica gel desiccant, which needs to be replaced regularly) inside the bag/box and attach a label that reads "Optical Component, Handle with Care, Moisture and Pressure Proof".

Placement Requirements

Place horizontally and do not stack or apply heavy pressure. The stacking height should not exceed 3 layers to prevent deformation of the lower products. For coated mirrors, ensure the coated surface is facing up to avoid scratches from contact with the padding.

Storage racks should be made of stainless steel or anodized aluminum. Do not use untreated iron shelves to prevent rust from contaminating the products.

III. Operation and Management Standards

Personnel Operation Requirements

Before handling the product, operators should wear clean anti-static clothing, anti-static gloves, dust-free caps, and masks to avoid direct contact of skin oils and sweat with the optical surface.

When taking or placing the mirror, only hold the non-optical edge area. Do not touch the mirror surface. If position adjustment is needed, use a dedicated vacuum pen (compatible with the optical component specifications) for operation.

Regular Inspection and Maintenance

Conduct a temperature and humidity, and cleanliness inspection of the storage environment once a week and record it. Adjust the temperature and humidity in a timely manner if they exceed the range. Monthly, a random inspection of the appearance of the inventory products is conducted to check for any scratches, dust, mold spots or other abnormalities on the mirror surface. Any issues found should be addressed promptly.

The desiccant should be replaced every three months. For vacuum-packed products, the sealing condition should be checked regularly. If any leakage is detected, reseal the product.

Inventory turnover management

Adhere to the first-in, first-out principle. Prioritize the dispatch of products with longer storage time to avoid performance degradation due to long-term inventory. It is recommended that the inventory cycle does not exceed 12 months. Products that have exceeded this period should be retested for optical performance.

IV. Handling of Special Situations

If a small amount of dust adheres to the surface of the reflector by accident, do not wipe it with ordinary tissues or cloths. Instead, in a clean environment, use a nitrogen gun (pressure ≤ 0.2MPa) to gently blow along the tangent direction of the mirror surface.

If there are slight mold spots on the surface, immediately contact professional optical component maintenance personnel for handling. Do not use cleaning agents to wipe it by yourself to avoid damaging the substrate or coating.

Through strict storage management, UltraOpto 193nm reflectors can effectively maintain their optical accuracy and reflectivity stability, ensuring optimal performance after installation and providing reliable support for high-end applications such as deep ultraviolet lithography.