UItraopto Precision Optics Co. Ltd. 193nm calcium fluoride window plate has laser-grade surface quality and parallelism, limiting the transmission wavefront distortion to λ/10. Ultra-high transmittance, 193nm transmittance > 99%. Suitable for ArF excimer laser (193nm wavelength) applications.
Wafer defect detection:
193nm lasers can distinguish smaller wafer surface defects. High transmittance window sheets are used to inspect the sealing and protection of the optical path.
Deep ultraviolet spectroscopy analysis:
In the fields of materials science and chemical analysis, 193nm deep ultraviolet spectroscopy is used to analyze the electronic structure and chemical bond properties of materials.
Laser cavity mirror protection window:
In the resonant cavity of an ArF excimer laser, a window plate can be used to protect the highly reflective cavity mirror from being contaminated by plasma or impurities generated during the laser discharge process.
Laser processing and micro-nano manufacturing:
193nm lasers can be used for high-precision micro-nano processing.
UItraopto Precision Optics Co. Ltd Micro can provide a variety of laser/protection/window frames made of different quartz materials. Optical Windows with a single or multi-layer anti-reflective coating can be customized according to customer requirements in specific sizes and materials.
UItraopto Precision Optics Co. Ltd can stably provide this type of product through precise control of polishing, coating and bonding processes, and accepts custom window sheets of various specifications.
Imported calcium fluoride single crystals
General Specifications | |
Substrate: Calcium fluoride single crystal | Surface quality: 20/10-60/40 |
Coating: 193nm AR | Transmittance: > 99% |
Surface accuracy: 1/10λ@632.8nm or higher | Aperture: > 90% |
Size: 0.25mm-150mm | Size error: +0.0/-0.1mm |
Size specifications and coating requirements are customized according to demand | |
Ultraopto’s 193nm Calcium Fluoride (CaF₂) Window Sheet is a high-performance deep UV optical component engineered for exceptional transmittance at 193nm wavelength, serving as a core part in ArF excimer laser systems, semiconductor lithography, deep UV detection and precision optical instrumentation. Crafted from high-purity single-crystal calcium fluoride with minimal impurities, our window sheet exhibits an ultra-broad spectral transmission range from 0.13μm (vacuum UV) to 10μm (far IR), with a transmittance exceeding 94% at the critical 193nm wavelength, ensuring efficient light transmission and minimal absorption loss for deep UV applications. The material’s cubic crystal structure and excellent optical homogeneity minimize birefringence and light scattering, making it ideal for high-precision optical systems requiring stable performance across broad spectral ranges.
Manufactured with advanced precision polishing and crystal processing technology, our 193nm Calcium Fluoride Window Sheet achieves superior surface quality with a 60-40 scratch-dig rating and tight dimensional tolerance control (+0.0/-0.1mm for length/width, ±0.1mm for thickness), ensuring seamless integration into complex optical setups.
The window sheet features a clear aperture of over 90% and excellent parallelism (≤3 arc minutes), reducing optical path deviation and ensuring consistent performance across the entire active area. With a high laser-induced damage threshold and robust mechanical properties (Knoop hardness 158.3 kg/mm²), it can withstand high-energy deep UV laser irradiation and resist mechanical shock and thermal shock, ensuring long-term stable operation in harsh industrial environments and high-power laser systems. The material is also chemically stable and compliant with REACH and ROHS standards, making it suitable for environmentally sensitive applications such as semiconductor manufacturing and biomedical research.
We offer the 193nm Calcium Fluoride Window Sheet in a variety of standard sizes (10mm×10mm×1mm, 38mm×19mm×4mm, 50mm×25mm×6mm, etc.) and fully custom dimensions, including rectangular, circular and special-shaped designs to match specific optical system requirements. Optional coatings such as anti-reflection (AR) coatings optimized for 193nm or broad spectral ranges are available to further reduce surface reflection loss and enhance transmittance efficiency. The window sheet’s low thermal expansion coefficient and excellent thermal conductivity ensure stable optical performance even under temperature fluctuations, avoiding thermal deformation and wavelength drift in high-precision applications.
Ultraopto’s 193nm Calcium Fluoride Window Sheet is widely applied in cutting-edge deep UV optical fields, including ArF excimer laser systems as cavity windows and beam delivery components, and semiconductor lithography for protecting optical elements and ensuring precise light transmission in 193nm lithography tools. In deep UV detection systems, it serves as a protective window for sensors and detectors, enabling accurate measurement and analysis of deep UV radiation, while in scientific research, it is used in vacuum UV spectroscopy and excimer laser-based experiments. Additionally, the window sheet is essential in industrial deep UV processing equipment, aerospace optical sensors and biomedical diagnostic systems requiring broad spectral transmission and high deep UV performance. Its unique combination of deep UV transmittance, broad spectral range and mechanical stability makes it a versatile solution for the most demanding optical applications.
As a professional manufacturer of high-performance calcium fluoride optical components, Ultraopto offers fully customized 193nm Calcium Fluoride Window Sheet solutions to meet your unique deep UV application requirements. Our experienced R&D and engineering team can tailor the size, thickness, surface quality, parallelism and optional coatings to match your specific optical system design, with ultra-strict tolerance control for critical parameters such as transmittance and dimensional accuracy. We also provide custom crystal orientation and homogeneity optimization for ultra-high precision applications such as semiconductor lithography.
All custom window sheet orders undergo multi-stage strict optical performance testing and quality inspection, including transmittance measurement at 193nm, surface quality inspection, dimensional verification and environmental stability testing, with a detailed quality inspection report provided to ensure the final product fully complies with your design specifications and application needs. Backed by advanced calcium fluoride processing technology, a complete quality control system and stable batch supply capacity, Ultraopto is committed to providing global customers with high-quality 193nm Calcium Fluoride Window Sheet products and comprehensive deep UV optical solutions. For more detailed technical parameters, product quotation information or custom design solutions for our Ultraopto 193nm Calcium Fluoride Window Sheet, please contact our professional sales and technical team through the official website, and we will provide you with efficient, professional and personalized optical solutions to support the development and production of your high-precision deep UV optical systems.
